书名: MEMS Microsystems: Design, Manufacture, and Nanoscale Engineering 中文名: 微机电系统与微系统: 设计、制造与纳米工程 书籍简介 : Technology/Engineering/Mechanical 技术/工程/机械 A bestselling MEMS text...now better than ever. 一本最畅销的MEMS书籍。 An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. 本书介绍的微机电系统和微系统的工程设计方法涉及电气和机械两方面技术。第一版出版后的五年,MEMS相关科学技术出现了重大变化,包括微系统技术和纳米技术。为了应对日益增加的需要工程师掌握的基本知识和经验,该版精心更新,引进全新的章节:纳米技术。 本书拥有很多案例研究和应用实例支撑,方便理解及实际应用,对于专业人员和高级机械或电气工程专业的学生来说,第二版将具有重要的价值。更多信息请点击: 微机电系统与微系统: 设计、制造与纳米工程 。