Infrared LED and Laser Product Overview The Next Generation of Wireless IR Links http://www.laseroptronics.com/ Connecting high-speed LAN systems while maintaining full network speeds can be accomplished by using high-performance infrared (IR) optical LED/laser technology. Wireless infrared optical systemsor FSO (free space optical) systems offer a complete series of next generation wireless line-of-sight IR communication solutions. The Flight Family of FSOsystems are a result of30 aggregate years of research and development in the field of IR communications. Using the right combination of LED/VCSEL/LASER transmit/receive boards, IR systems can be tailored to your specific speed and distance requirements. The Technology Free-Space Optics (FSO) is a line-of-sight technology that uses lasers to provide optical bandwidth connections. Currently, FSO is capable of up to 2.5 Gbps of data, voice and video communications through the air allowing optical connectivity without requiring fiber-optic cable or securing spectrum licenses. FSO requires light which can be focused by using either light emitting diodes (LEDs) or lasers (light amplification by stimulated emission of radiation). The use of lasers is a simple concept similar to optical transmissions using fiber-optic cables; the only difference is the medium. Light travels through air faster than it does through glass, so it is fair to classify FSO as optical communications at the speed of light. FSO technology is relatively simple. It's based on connectivity between FSO units, each consisting of an optical transceiver with a laser transmitter and a receiver to provide full duplex (bi-directional) capability. Each FSO unit uses a high-power optical source (i.e. laser), plus a lens that transmits light through the atmosphere to another lens receiving the information. The receiving lens connects to a high-sensitivity receiver via optical fiber. FSO technology requires no spectrum licensing. FSO is easily upgradeable and its open interfaces support equipment from a variety of vendors which helps service providers protect their investment in embedded telecommunications infrastructures. How it Works FSO involves the optical transmission of voice, video, and data using air as the medium of transmission as opposed to fiber optic cable. Transmission using FSO technology is relatively simple. It involves two systems each consisting of an optical transceiver which consists oflaser transmitter and a receiver to provide full duplex (bi-directional) capability. Each FSO system uses a high-power optical source (e.g., laser ) plus a telescope that transmits light through the atmosphere to another telescope that receives the information. At that point, the receiving telescope connects to a high-sensitivity receiver through an optical fiber. Unlike radio frequencies, the technology requires no spectrum licenses. It is easily upgradeable, and its open interfaces support equipment from a variety of vendors, which helps carriers protect the investment in their embedded infrastructures.
Saul Perlmutter, who led one of two teams that simultaneously discovered the accelerating expansion of the universe, has been awarded the 2011 Nobel Prize in Physics, to be shared with two members of the rival team. Perlmutter, 52, a professor of physics at the University of California, Berkeley, and a faculty senior scientist at Lawrence Berkeley National Laboratory (LBNL), led the Supernova Cosmology Project that, in 1998, discovered that galaxies are receding from one another faster now than they were billions of years ago. He will share the prize with Adam G. Riess, 41, of The Johns Hopkins University and Brian Schmidt, 44, of Australian National University’s Mount Stromlo and Siding Spring Observatories, two members of the competing High-Z Supernova Search team. When the discovery was made, Riess was a postdoctoral fellow at UC Berkeley working with astronomer Alex Filippenko, who at different times was a member of both teams. Perlmutter is the fifth Nobel winner for UC Berkeley in the past 11 years, and the 22nd Nobelist overall. This is the ninth Nobel in Physics awarded to a UC Berkeley faculty member, the most recent winner being George Smoot in 2006. The most recent National Research Council nationwide rankings identify the Department of Physics as among the best in the nation. The accelerating expansion means that the universe could expand forever until, in the distant future, it is cold and dark. The teams’ discovery led to speculation that there is a “dark energy” that is pushing the universe apart. Though dark energy theoretically makes up 73 percent of the matter and energy of the universe, astronomers and physicists have so far failed to discover the nature of this strange, repulsive force. In recent years, Perlmutter has been working with NASA and the U.S. Department of Energy (DOE) to build and launch the first space-based observatory designed specifically to understand the nature of dark energy. A dark-energy mission was named the top telescope-building priority in an August 2010 report from a blue-ribbon committee of the National Academy of Sciences. Using supernovae as cosmic yardsticks Perlmutter was a postdoctoral fellow at LBNL when he decided to focus on Type Ia supernovae as yardsticks to measure the geometry of the universe. Astronomers knew that the universe was expanding, but the main question at the time was whether the universe was open, and thus destined to expand forever, or closed, meaning that the expansion would eventually stop and the universe would collapse back on itself. He and his LBNL team were puzzled by initial results in 1997 indicating that, not only was the universe’s expansion not slowing down, it was speeding up, contrary to all cosmological theories. “The chain of analysis was so long that at first we were reluctant to believe our result,” Perlmutter said. “But the more we analyzed it, the more it wouldn’t go away.” The High-Z team came to the same conclusion at the same time, based on an independent set of Type Ia supernovae. “There was no hint of this when we started the project,” Riess said in 1998 while still a Miller Postdoctoral Research Fellow at UC Berkeley. “We expected to see the universe slowing down, but instead, all the data fit a universe that is speeding up.” The discovery, reported by both teams in 1998, has since been bolstered by independent measurements. The earliest and most important of these confirmations were by the Millimeter Anisotropy eXperiment IMaging Array (MAXIMA), a balloon-borne experiment led by UC Berkeley physicist Paul Richards, and the Balloon Observations Of Millimetric Extragalactic Radiation and Geophysics (BOOMERanG) experiment, led by the late Andrew Lange, a former UC Berkeley post-doctoral fellow, and Paolo De Bernardis. Team effort “This discovery was very much a team effort,” Perlmutter stressed, citing the efforts of the Supernova Cosmology Project’s individual members in theoretical studies of supernova dynamics, the detection of supernovae near and far, data analysis and interpretation, and other research components. Perlmutter graduated magna cum laude in physics from Harvard University in 1981 and began graduate work at the UC Berkeley, where he gravitated toward the study of astrophysics. He completed his Ph.D. with Richard Muller, UC Berkeley professor of physics, in 1986. While still a post-doctoral fellow, Perlmutter teamed up with fellow post-doc Carl Pennypacker to develop the technology to use Type Ia supernovae – which are bright enough to be seen across the universe – to measure cosmological distances. Other astronomers had observational data suggesting that Type Ias were all about the same intrinsic brightness, so that their apparent brightness from Earth could be used to calculate their distance. With observing time on several telescopes around the world, the Supernova Cosmology Project was able to test and improve its techniques. When the team eventually sat down with new data on Type Ia supernovae to calculate the basic parameters of the universe, however, the results were too bizarre to be believed. “The most striking part of the project was the huge skepticism,” recalled Pennypacker, now with UC Berkeley’s Space Sciences Laboratory and a guest in LBNL’s Physics Division. The skepticism was not only about proposed techniques, but about the underlying science. “Nobody believed we could do it,” he said, “and it was an enormous challenge to get things done.” Perlmutter, a member of the National Academy of Sciences and a fellow of the American Academy of Arts and Sciences, has received numerous honors, including the 2006 Shaw Prize, shared with Schmidt and Riess; the 2007 Gruber Cosmology Prize, which he shared with his entire Supernova Cosmology Project team and the High-Z Supernova Search team; the 2003 California Scientist of the Year award; and the 2002 E. O. Lawrence Award in physics from the Department of Energy. He lives in Berkeley with his wife and daughter. 原文见 http://www.berkeleydailyplanet.com/issue/2011-10-04/article/38511?headline=UC-Berkeley-s-Saul-Perlmutter-awarded-2011-Nobel-Prize-in-Physics
Osram and Philips sign LED and OLED cross-license 28 Jan 2007 The two largest lighting companies have agreed to license each other's LED and OLED patents. Osram and Philips have signed a patent cross-license agreement that involves the mutual licensing of patents for inorganic and organic LEDs. In a very short press release, the companies said that the agreement relates to patents held by Philips, including its US-based subsidiary Lumileds, a power LED specialist, and to those held by Osram including its subsidiary Osram Opto Semiconductors. We expect this to put us in an even better position to use LED technology to serve the demands of the market, said Ruediger Mueller, president and CEO of Osram Opto Semiconductors. As expected from the world's two largest lighting manufacturers, Philips and Osram are major players in the LED market, and also deeply involved in research and development efforts in the field of organic LEDs for lighting applications. For more on the OLED lighting market, see the article in the forthcoming Jan/Feb 2007 issue of LEDs Magazine . The alliance marks the latest IP agreement between major manufacturers in the LED market. Back in 2002, Nichia signed licensing agreements with its major rivals Toyoda Gosei, Osram Opto, Lumileds and Cree. In February 2006, Osram and Avago signed a cross-licensing agreement, and in April of that year another agreement was signed between Toyoda Gosei and Lumileds. In addition, the white LED field has seen numerous patent disputes and licensing agreements, some of which are summarized in the diagram.
微波 CVD 金刚石薄膜用作 LED 散热片的制备 满卫东 1 ,孙蕾 1 ,吴宇琼 2 ,谢鹏 1 ,余学超 1 ,汪建华 1 (1. 武汉工程大学等离子体化学与新材料重点实验室,武汉 430073 2. 江汉大学化学与环境工程学院, 武汉 430056 ) 摘要 由于金刚石具有室温下最高的热导率,因此用化学气相沉积( CVD )制备的金刚石膜是大功率发光二极管理想的散热材料。本文利用微波等离子体 CVD 研究了不同沉积工艺下金刚石薄膜的生长。用扫描电子显微镜( SEM )和拉曼光谱对得到的金刚石薄膜进行了表征,并将金刚石薄膜用作 LED 散热片的散热效果进行了检测。结果表明:在硅衬底上沉积 20-30 μm 的 CVD 金刚石薄膜可以有效地降低 LED 的工作温度;在相同的制备成本下,提高薄膜的厚度(甲烷浓度 4 %)比提高薄膜的质量(甲烷浓度 2 %)更有利于提高 LED 的散热效果。本研究表明微波等离子体 CVD 制备的金刚石薄膜是大功率 LED 的理想散热衬底材料。 关键词 微波等离子体;化学气相沉积;金刚石膜;散热片; LED Microwave CVD diamond thin Film for LED heat spreader Man Weidong 1 , Sun Lei 1 , Wu Yuqiong 2 , Xie Peng 1 , Yu Xuechao 1 , WANG Jianhua 1 ( 1. Provincial Key Laboratory of Plasma Chemistry Advanced Materials, Wuhan Institute of Technology, Wuhan 430073 ) (2. School of Materials Science Engineering, Wuhan Institute of Technology, Hubei Wuhan 430056) Abstract Due to the highest thermal conductivity at room temperature, chemical vapor deposition (CVD) diamond film is an ideal heat spreader material for high power light emitting diode (LED). In this paper, microwave plasma enhanced CVD diamond films were deposited and characterized with SEM and Raman spectrum. Effect of heat-spreading was tested on LED. The results show that diamond thin film with thickness of 20-30 μm , used as the heat spreader, can decrease the working temperature of LED, and under the same deposition cost, increasing the thickness of diamond thin film (using 4%CH4), heat-spreading effect is better than that of improving the quality of diamond thin film(using 2%CH4). All the works show that the diamond thin film deposited with microwave plasma CVD is a kind of ideal heat-spreader for high power LED. Key words microwave plasma ; chemical vapor deposition ; diamond film ; heat-spreader ; LED 0 引言 发光二极管 (Light Emitting Diode, 简称 LED) 与传统的白炽灯相比具有驱动电压低、节能、高稳定度、响应时间短、不含有害的金属汞等优点。美国等国家对 LED 照明效益进行了预测,美国 55% 白炽灯及 55% 的日光灯将被 LED 取代,每年可节省 350 亿美元电费,减少 7.55 亿吨二氧化碳排放量 。然而 , LED 的价格目前还比较昂贵,较之于白炽灯,几只 LED 的价格就可以与一只白炽灯的价格相当,而由于 LED 的发光功率较低,通常每组信号灯需由 300 ~ 500 只二极管构成。如果能低成本制备出高功率的 LED, 将有助于用 LED 取代传统的白炽灯或日光灯作为照明工具。在台湾地区首届 LED 照明展( LED Lighting Taiwan 2005 )中 ,新强光电( NeoPac Lighting )公司展出了新开发的超高功率( Ultra-High-Power )的 Single Packaged LED ,输出功率可达到 30 W ,号称是当时全球以 LED 作为亮点光源最亮的产品,如图 1 所示。而能完成如此高功率的点光源 LED 开发,与新强光电突破 LED 点光源的散热问题有相当大的关联。有关技术人员说: “ 点光源 LED 的温度极限在 120 ℃ ,而新强光电有能力控制其温度在 120 ℃ 以下,且产品寿命可达到 6 0,000 h 。 ” 可以看到,提高 LED 的散热能力是提高 LED 工作功率的关键。用什么材料能提高 LED 的散热能力呢?我们知道,金刚石具有在室温下最高的热导率 ,且是良好的绝缘体,因此金刚石膜是 LED 理想的散热材料。但目前商业上可以得到的金刚石散热片,其厚度往往有数百微米,如果用常用的微波等离子体化学气相沉积法( MPCVD )制备,以 0.5 - 1.0 μm/h 的生长速度沉积一块厚度约为 600 μm 的金刚石膜,仅生长就需要超过 600 h ,且这样的金刚石厚膜表面非常粗糙,需要进行打磨,而金刚石具有极高的硬度和高的化学稳定性,因此平整化金刚石膜表面也是一项费时费力的加工 [ 6 ] 。如果用这样制备的金刚石膜用作 LED 的散热材料,昂贵的生产成本会制约 LED 大规模的使用。能否考虑用沉积时间较短、成本较低、表面粗糙度不高而可以免去平整化加工的金刚石薄膜用作 LED 散热材料呢?本文研究了不同沉积工艺下金刚石薄膜的生长,并将金刚石薄膜直接用作 LED 的散热片,并对散热效果进行了检测。 1 实验过程 将 Φ 25mm 2mm 的单晶硅作为生长金刚石薄膜的衬底材料,为了提高形核密度,先用 1.5μm 的金刚石研磨膏研磨 Si 片 10min ,然后分别用丙酮、甲醇超声清洗,晾干。置入自制的 5KW 微波等离子体金刚石膜沉积腔中沉积金刚石薄膜 。反应气体为氢气和甲烷,总气体流量为 200 sccm ( sccm: 标准立方厘米每分钟),基片温度通过调节基片台内的冷却水流量来控制,温度用红外测温仪通过真空腔体的观测窗测量得到。其它具体的沉积工艺及所得到的薄膜的数据列于表 1 中。 表 1 金刚石膜样品生长工艺参数及测得的膜的数据 Table 1 Growth conditions of CVD diamond films and growth rate of as-grown diamond films 样品编号 CH4 浓度 ( % ) 沉积气压 ( kPa ) 微波功率 ( W ) 沉积时间 ( h ) 沉积温度 ( ℃ ) 生长速率 (μm/h) A 系列 4.0 12.0 4000 10 850 3.3 B 系列 2.0 850 2.1 沉积得到的金刚石薄膜的表面形貌和质量分别通过扫描电子显微镜( SEM )和拉曼光谱( Raman )进行表征。金刚石薄膜的散热性能通过测量集成在其表面的 LED 的工作温度来进行衡量 : 将沉积有金刚石薄膜的 Si 片表面直接用来封装 LED 发热单元,然后进行测试,测试方法为给 LED 器件施加相同的电耗功率,然后记录不同时间 LED 器件表面的温度,以衡量金刚石膜散热层的散热效果。检测要求:器件表面温度在工作 5 分钟内不超过 100 ℃ 为合格。如果没有散热层,而直接将 LED 封装在 Si 片表面,温升很快超过 100 ℃ ,为不合格。测试结果见表 2 。 2 结果与讨论 图 2 显示了不同甲烷浓度下所制备的金刚石薄膜的表面形貌,从图 2(a) 可以看到,甲烷浓度为 4 %时,由于碳浓度较高, CVD 金刚石二次形核现象比较突出,金刚石晶粒尺寸较小,晶面不完整;降低甲烷浓度到 2 %,如图 2(b) 所示,二次形核现象明显减少了,晶面比较完整,晶粒尺寸也较大。说明碳源浓度的不同对 CVD 金刚石的生长影响很大。 结合前面的结果,可以看出,在保持其它工艺参数基本不变的前提下,提高碳源的浓度,可以提高金刚石膜的生长速度,从而得到厚度较大的薄膜,但金刚石膜的质量会降低;反之,降低碳源的浓度,可以提高薄膜的纯度和质量,但得到的薄膜厚度较小。该结果与 Hung C.C. 等人的研究结果类似 。 根据样品 A 系列和 B 系列用作 LED 散热片的散热效果检测(表 2 )可以看到,样品 A 系列和样品 B 系列都能满足 LED 的散热要求。之所以在 Si 表面添加金刚石薄膜散热层后可以有效的提高 LED 的散热效果,其原因是如果没有金刚石薄膜作为散热层(见图 4a , 图中的箭头是热量流动方向及大小的示意图 ) 。 LED 的散热是通过其自身将热量传递到散热能力较差的介质如封装导热胶及硅基底 , 属于 “ 点散热 ” ; 而施加了金刚石薄膜作为散热层之后 , 利用金刚石膜的高热导率,可以将 LED 的热量迅速扩散进入整个金刚石膜中,然后通过整个金刚石膜进行热扩散到与之接触的介质当中 , 这样的散热属于 “ 面散热 ” , 因而可以大幅度的提高散热效果。因此,由于金刚石薄膜的存在,将工作中的 LED 器件的点散热变成了金刚石膜的面散热,因此提高了散热效率,从而降低了 LED 的工作温度。 虽然使用金刚石薄膜作为散热片后, LED 的散热效果都达到了合格要求,但是两种工艺得到的金刚石薄膜的散热效果是不同的,比较表 2 可以看到, A 系列的散热效果要好于 B 系列。 A 系列和 B 系列的沉积工艺是十分相似的,除了不同的 CH4 浓度外,其他沉积工艺都是一样的,由于碳源材料的成本在微波法制备 CVD 金刚石膜的过程中所占比例是十分小的,因此,在本研究中,可以说二者的制造成本是大致相当的,但由于碳源浓度不同导致所沉积的金刚石膜的纯度及膜的厚度不同: A 系列由于碳源浓度较高,因此所沉积金刚石膜中非金刚石碳含量较高,质量较低,但由于薄膜的生长速度较高,所以 A 系列的膜厚较大;而 B 系列的样品由于碳源浓度较低,因此其非金刚石碳含量较低,质量较高,但由于薄膜的生长速度较低,所以膜的厚度较小。一般来说, CVD 金刚石膜的生长质量和生长速度很难同时兼顾 [ 8 ] ,因此在相同的制备成本前提下,提高薄膜的质量与提高薄膜的生长速率二者到底哪一种对提高散热效率有更大的帮助呢?本研究结果表明,提高金刚石膜的生长速度对提高散热效果帮助更大。图 5 显示了在本研究中用金刚石薄膜作为 LED 散热层的各阶段样品的外形图。 3 结论 用微波 CVD 法制备的金刚石薄膜,不同的碳源浓度,对金刚石薄膜的生长有很大的影响;将金刚石薄膜用作大功率 LED 的散热片,可以有效地降低 LED 的工作温度;在相同的制备成本下,提高金刚石薄膜的生长速度比提高金刚石薄膜的质量,能更有效地提高散热效果。研究结果表明微波法制备的 CVD 金刚石薄膜是大功率 LED 理想的散热材料。 感谢广东省安富电子有限公司对 LED 散热效果的检测。 参考文献 [ 1 ] http://www.china-led.net/Html/zsjiangtang/jingjiang/2006-2/20/105000324_2.htm(2006) [ 2 ] http://projector.zol.com.cn/2005/0610/177151.shtm ( 2006 ) [ 3 ] May P W , Diamond thin films: a 21st-century material. Phil. Trans. R. Soc. Lond. A, 2000, 358:473. [ 4 ] Naseem H.A., Haque M.S., Khan M.A., et al. Thin Solid Films, 1997:308-309:141 [ 5 ] Ralchenko V., Sychov I., Vlasov I., et al. Quality of diamond wafers grown by microwave plasma CVD: effects of gas flow rate, Diamond Relat. Mater., 1999,8:189 [ 6 ] Malshe A.P., Park B.S., Brown W.D., et al. A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates, Diam. Rel. Mater., 1999, 8:1198 [ 7 ] Man W.D., Wang J.H., Wang C.X., et al. Microwave CVD Diamond Thick Film Synthesis using CH4/H2/H2O Gas Mixtures, Plasma Science Technology, 2006, 8(3):329 [ 8 ] Hung C.C., Shih H.C., Experimental design method applied to microwave plasma enhanced chemical vapor deposition diamond films, J. Crystal Growth, 2001, 233:723 附件为发表的原文 微波CVD金刚石薄膜用作LED散热片的制备 如果需要CVD金刚石膜设备,可以与我联系,可以根据要求进行配置,从而满足不同的科研,教学的要求。 热丝CVD或者各种功率大小的微波CVD均可以与我联系!喜欢CVD金刚石膜的朋友,可以看我博客中的其他文章。 我的工作QQ:1037445911 。 ------------------------------------- 欢迎看看我的其他的博客内容: 金刚石薄膜的性质、制备及应用 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=231983 微波等离子体化学气相沉积—— 一种制备金刚石膜的理想方法 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=232233 微波CVD金刚石膜产品及应用分析 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=402659 关于(微波法)CVD金刚石膜产业化的看法 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=402561 Carnegie-Made Diamonds on Exhibit(CVD金刚石产品展示) http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=386101 国外先进的微波等离子体CVD制备金刚石膜设备介绍(Diamond) http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=384330 微波等离子体CVD制备金刚石膜 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=384313 Synthetic Diamonds http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=351296 微波等离子体同质外延修复金刚石的研究 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=232229 微波CVD金刚石薄膜用作LED散热片的制备 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=232213 提高金刚石薄膜与硬质合金基底之间附着力工艺的研究进展 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=231988 CVD金刚石膜简介(CVD diamond introduction) http://hi.baidu.com/ 金刚石薄膜 /blog/item/87459ccfe6da692cb600c8b4.html 热丝 CVD 制备金刚石膜介绍( HFCVD system for diamond deposition) http://hi.baidu.com/ 金刚石薄膜 /blog/item/1cc9591769b61a0d962b433c.html CVD金刚石膜图片(CVD diamond pictures) http://hi.baidu.com/ 金刚石薄膜 /blog/item/b6b60f19b9506ba14aedbc95.html Big breakthrough in Synthetic Diamond technology for Apollo(CVD钻石生产的大突破) http://hi.baidu.com/ 金刚石薄膜 /blog/item/defd1123a47f90e6d6cae25c.html 牛粪就可做钻石 http://hi.baidu.com/ 金刚石薄膜 /blog/item/d5ffc6c3f87f0920e5dd3b87.html Artificial diamonds - now available in extra large(人造大钻石) http://hi.baidu.com/ 金刚石薄膜 /blog/item/9b963f0139e3b692e950cdb2.html CVD single-crystal diamond growth(单晶钻石的制备) http://hi.baidu.com/ 金刚石薄膜 /blog/item/6838d0ef29a406eeb3fb95eb.html 国外微波法制备金刚石膜设备介绍(microwave plasma CVD diamond system introduction) http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogview=mefrom=spacepage=2 MPCVD法在基片边缘生长大颗粒金刚石的研究 http://hi.baidu.com/ 金刚石薄膜 /blog/item/379e83546858b8d1b645ae6c.html 不同衬底材料上外延CVD金刚石的研究 http://hi.baidu.com/ 金刚石薄膜 /blog/item/c979ae7e690c541d28388a8e.html Boron doped diamond electrode for the wastewater treatment http://hi.baidu.com/ 金刚石薄膜 /blog/item/c2fb1def86c2683c2cf534c7.html 等离子体技术——一种处理废弃物的理想方法 http://bbs.sciencenet.cn/home.php?mod=spaceuid=257140do=blogid=259594